Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 08, 2017
Source ID
10.1088/1361-6439/aa73af

Entities

People

  • David A. Horsley
  • M. Defoort
  • P. Taheri-tehrani

Organizations

  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems