Measurement of Young’s modulus and residual stress of atomic layer deposited Al2O3and Pt thin films

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 20, 2017
Source ID
10.1088/1361-6439/aa73e6

Entities

People

  • Alwin Daus
  • Ando Feyh
  • Fabian Purkl
  • Gerald Urban
  • J. Provine
  • Thomas W. Kenny
  • Timothy S. English

Organizations

  • Defense Advanced Research Projects Agency