Scanning digital lithography providing high speed large area patterning with diffraction limited sub-micron resolution

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 25, 2018
Source ID
10.1088/1361-6439/aabb1f

Entities

People

  • Arun Bhaskar
  • Hongjie Zhang
  • Sy-bor Wen

Organizations

  • Air Force Research Laboratory