A wide-bandwidth tri-axial pendulum accelerometer with fully-differential nano-gap electrodes

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 07, 2018
Source ID
10.1088/1361-6439/aadc7e

Entities

People

  • D E Serrano
  • Farrokh Ayazi
  • Yaesuk Jeong

Organizations

  • Defense Advanced Research Projects Agency