A monolithic Si-micromachined four-stage Knudsen pump for µGC applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 21, 2021
Source ID
10.1088/1361-6439/abd264

Entities

People

  • Qisen Cheng
  • Tsenguun Byambadorj
  • Yogesh Gianchandani
  • Yutao Qin

Organizations

  • Intelligence Advanced Research Projects Activity