A multi-term Boltzmann equation benchmark of electron-argon cross-sections for use in low temperature plasma models

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 02, 2018
Source ID
10.1088/1361-6463/aaaf8b

Entities

People

  • Jacob C Stephens

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Microelectronics