Subtractive fabrication of ferroelectric thin films with precisely controlled thickness

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 22, 2018
Source ID
10.1088/1361-6528/aaac9b

Entities

People

  • Anton V Ievlev
  • Donovan N. Leonard
  • Gabriel A. Velarde
  • Joshua C Agar
  • Lane W Martin
  • Marius Chyasnavichyus
  • Olga S Ovchinnikova
  • Petro Maksymovych
  • Sergei V. Kalinin

Organizations

  • Oak Ridge National Laboratory