Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 09, 2019
Source ID
10.1088/1361-6528/ab560f

Entities

People

  • Bo Hsu
  • Liliana Stan
  • Michael Stroscio
  • Mitra Dutta
  • Sidra Farid

Organizations

  • Argonne National Laboratory
  • United States Army Research Laboratory