Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: the role of metastable atoms

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2021
Source ID
10.1088/1361-6595/ac1b22

Entities

People

  • De‐Qi Wen
  • Emi Kawamura
  • Janez Krek
  • John Verboncoeur
  • Jon Tomas Gudmundsson
  • Michael A. Lieberman