Fabrication of Ge-on-insulator wafers by Smart-CutTMwith thermal management for undamaged donor Ge wafers

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 13, 2017
Source ID
10.1088/1361-6641/aa9bcd

Entities

People

  • Hongyi Mi
  • Jung U Yoon
  • Jung-Hun Seo
  • Munho Kim
  • Sang June Cho
  • Solomon Mikael
  • Yash Jayeshbhai Dave
  • Zhenqiang Ma

Organizations

  • Air Force Office of Scientific Research
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems