Growth and etching characteristics of (001)β-Ga2O3by plasma-assisted molecular beam epitaxy
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 12, 2017
- Source ID
- 10.1088/1361-6641/aa9c4d
Entities
People
- Elaheh Ahmadi
- Feng Wu
- James S. Speck
- Stephen Kaun
- Yuichi Oshima
Organizations
- Air Force Office of Scientific Research