Enhanced optical and electrical performance of Ge1−x Sn x /Ge/Si(100) (x = 0.062) semiconductor via inductively coupled H2 plasma treatments

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 20, 2019
Source ID
10.1088/1361-6641/ab0916

Entities

People

  • Buguo Wang
  • John Kouvetakis
  • Michael R. Hogsed
  • Patrick M. Wallace
  • Thomas R. Harris

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Microelectronics