Characterization of AlSiO dielectrics with varying silicon composition for N-polar GaN-based devices

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 11, 2020
Source ID
10.1088/1361-6641/ab9ecb

Entities

People

  • Athith Krishna
  • Islam Sayed
  • Jana Georgieva
  • S. Keller
  • Umesh Mishra
  • Wenjian Liu

Organizations

  • Office of Naval Research