On electrical analysis of Al-rich p-AlGaN films for III-nitride UV light emitters

Abstract

In this work, an alternative scheme to estimate the resistivity and ionization energy of Al-rich p-AlGaN epitaxial films is developed using two large-area ohmic contacts. Accordingly, the resistivities measured using current–voltage measurements were observed to corroborate the Hall measurements in the Van der Pauw configuration. A free hole concentration of ∼1.5 × 1017 cm−3 and low ionization energy of ∼65 meV in Mg-doped Al0.7Ga0.3N films is demonstrated. Nearly an order of magnitude lower hydrogen concentration than Mg in the as-grown AlGaN films is thought to reduce the Mg passivation and enable higher hole concentrations in Al-rich p-AlGaN films, compared to p-GaN films. The alternate methodology proposed in this work is expected to provide a simpler pathway to evaluate the electrical characteristics of Al-rich p-AlGaN films for future III-nitride ultraviolet light emitters.

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 26, 2021
Source ID
10.1088/1361-6641/ac3710

Entities

People

  • Aakash Jadhav
  • Andrew Klump
  • Biplab Sarkar
  • Dolar Khachariya
  • Pegah Bagheri
  • Pramod Reddy
  • Ramón Collazo
  • Ronny Kirste
  • Seiji Mita
  • Shashwat Rathkanthiwar
  • Zlatko Sitar

Organizations

  • Air Force Office of Scientific Research
  • Army Research Office
  • National Science Foundation

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology