HfO 2 on UV–O 3 exposed transition metal dichalcogenides: interfacial reactions study

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 13, 2015
Source ID
10.1088/2053-1583/2/1/014004

Entities

People

  • Angelica Azcatl
  • Francis De Dios
  • Jiyoung Kim
  • Kyeongjae Cho
  • Moon J. Kim
  • Ning Lu
  • Rafik Addou
  • Robert M Wallace
  • Santosh Kc
  • Stephen McDonnell
  • Xiaoye Qin
  • Xin Peng

Organizations

  • Defense Advanced Research Projects Agency
  • National Institute of Standards and Technology
  • Semiconductor Research Corporation