Atomic layer deposition of ultra-thin and smooth Al-doped ZnO for zero-index photonics

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 24, 2018
Source ID
10.1088/2053-1591/aaa653

Entities

People

  • Aleksei Anopchenko
  • Catherine Arndt
  • Ho Wai Howard Lee
  • Long Tao
  • Sudip Gurung

Organizations

  • Defense Advanced Research Projects Agency