STEM Imaging with Beam-Induced Hole and Secondary Electron Currents

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 29, 2018
Source ID
10.1103/physrevapplied.10.044066

Entities

People

  • B. C. Regan
  • Ho Leung Chan
  • Matthew Mecklenburg
  • William A. Hubbard

Organizations

  • Defense Advanced Research Projects Agency
  • National Institutes of Health
  • National Science Foundation
  • University of California, Los Angeles

Tags

Technology Areas

  • Microelectronics