STEM Imaging with Beam-Induced Hole and Secondary Electron Currents
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 29, 2018
- Source ID
- 10.1103/physrevapplied.10.044066
Entities
People
- B. C. Regan
- Ho Leung Chan
- Matthew Mecklenburg
- William A. Hubbard
Organizations
- Defense Advanced Research Projects Agency
- National Institutes of Health
- National Science Foundation
- University of California, Los Angeles