Limits of Three-Dimensional Resolution and Dose for Aberration-Corrected Electron Tomography

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 05, 2021
Source ID
10.1103/physrevapplied.15.014003

Entities

People

  • Peter Ercius
  • Reed Yalisove
  • Robert Hovden
  • Suk Hyun Sung

Organizations

  • Army Research Office
  • Office of Science
  • United States Department of Energy

Tags

Technology Areas

  • Microelectronics