Interaction Between a Low-Temperature Plasma and Graphene: An in situ Raman Thermometry Study

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 08, 2021
Source ID
10.1103/physrevapplied.15.024018

Entities

People

  • Alexander A. Balandin
  • Carla Berrospe-Rodriguez
  • Fariborz Kargar
  • Giorgio Nava
  • J. Schwan
  • Lorenzo Mangolini

Organizations

  • Army Research Office
  • Consejo Nacional de Humanidades, Ciencias y Tecnologías
  • National Science Foundation
  • Semiconductor Research Corporation

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene