Energy dependence of the spatial distribution of inelastically scattered electrons in backscatter electron diffraction

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 05, 2018
Source ID
10.1103/physrevb.97.134104

Entities

People

  • Farangis Ram
  • Marc De Graef

Organizations

  • Air Force Office of Scientific Research
  • Carnegie Mellon University
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics