Two-dimensional electron gas oxide remote doping of Si(001)

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 26, 2018
Source ID
10.1103/physrevmaterials.2.115001

Entities

People

  • Arvin Kakekhani
  • Charles Ahn
  • Eric N Jin
  • Frederick J. Walker
  • Sohrab Ismail-Beigi

Organizations

  • National Science Foundation
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene