Electric-field-intensity-modulated scattering as a thin-film depth probe
Abstract
Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. Anin situmethod to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive informationin situat any grazing-incidence-capable beamline.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 05, 2020
- Source ID
- 10.1107/s1600576720013047
Entities
People
- Adam Weber
- Ahmet Kuşoğlu
- Peter J. Dudenas
Organizations
- Army Research Office
- Office of Science