Exploring Electron Kinetics in RF and Microwave Discharges Using a Non-Stationary, Multi-Term Boltzmann Equation Model

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 24, 2018
Source ID
10.1109/icops35962.2018.9575338

Entities

People

  • J. Stephens

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Microelectronics