Similarity of Low-Pressure Radiofrequency Discharges

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 06, 2020
Source ID
10.1109/icops37625.2020.9717810

Entities

People

  • Bocong Zheng
  • John Verboncoeur
  • Peng Zhang
  • Yangyang Fu

Organizations

  • Air Force Office of Scientific Research
  • Michigan State University
  • United States Department of Energy