Analysis of Self-Sustained Capacitively Coupled Microwave Plasmas Using a Circuit Modeling Technique

Document Details

Document Type
Pub Defense Publication
Publication Date
May 22, 2022
Source ID
10.1109/icops45751.2022.9813130

Entities

People

  • Abbas Semnani
  • Sandeep Narasapura Ramesh

Organizations

  • Office of Naval Research
  • University of Toledo