Similarity And Scaling Laws For Radio Frequency Discharge Plasmas Across Nonlinear Transition Regimes

Document Details

Document Type
Pub Defense Publication
Publication Date
May 22, 2022
Source ID
10.1109/icops45751.2022.9813195

Entities

People

  • Bofu Zheng
  • Dominic Yang
  • Hao Wang
  • John Verboncoeur
  • Po Zhang
  • Qi Hua Fan
  • Xufeng Wang
  • Yangyang Fu

Organizations

  • Air Force Office of Scientific Research
  • Michigan State University
  • National Science Foundation
  • Office of Science
  • Tsinghua University