Ferroelectric C-Axis Textured Aluminum Scandium Nitride Thin Films of 100 nm Thickness

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2020
Source ID
10.1109/ifcs-isaf41089.2020.9234910

Entities

People

  • Bernd Heinz
  • Deep Jariwala
  • Dixiong Wang
  • Eric Stach
  • Jeffrey Zheng
  • Kim Kisslinger
  • Martin Kratzer
  • Michael D’Agati
  • Myung-Geun Han
  • Paria S. M. Gharavi
  • Roy H. Olsson
  • Volker Roebisch
  • Xiwen Liu
  • Zichen Tang

Organizations

  • Brookhaven National Laboratory
  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Semiconductor Research Corporation