Characterization of AlScN on CMOS

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2020
Source ID
10.1109/ifcs-isaf41089.2020.9234939

Entities

People

  • Amit Lal
  • Benyamin Davaji
  • Jaibir Sharma
  • Justin Kuo
  • Navab Singh
  • Ved Gund
  • Yutong Liu

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation