Monocrystalline 4H Silicon Carbide-on-Insulator Substrates for Nav-Grade Planar BAW Gyroscopes

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 22, 2021
Source ID
10.1109/inertial51137.2021.9430480

Entities

People

  • Benoit Hamelin
  • Farrokh Ayazi
  • Jeremy Yang
  • Zhenming Liu

Organizations

  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems