Enhanced thermo-optic effect in PECVD deposited silicon-rich silicon nitride

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2020
Source ID
10.1109/ipc47351.2020.9252294

Entities

People

  • A. Friedman
  • Hani Nejadriahi
  • Paul K. L. Yu
  • Rajat Sharma
  • Steve Pappert
  • Yeshaiahu Fainman

Organizations

  • Office of Naval Research
  • University of California