Focusing Profiles of Planar Si-SiO2 Metamaterial GHz Frequency Ultrasonic Lens

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 11, 2021
Source ID
10.1109/ius52206.2021.9593577

Entities

People

  • Amit Lal
  • Benyamin Davaji
  • Juneho Hwang
  • Justin Kuo

Organizations

  • Cornell University
  • Defense Advanced Research Projects Agency
  • National Science Foundation

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems