All-Silicon Technology for High-$Q$ Evanescent Mode Cavity Tunable Resonators and Filters

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2014
Source ID
10.1109/jmems.2013.2281119

Entities

People

  • Dimitrios Peroulis
  • Muhammad Shoaib Arif

Organizations

  • Defense Advanced Research Projects Agency