Process Integration of Co-Sputtered Bismuth Telluride/Antimony Telluride Thermoelectric Junctions
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2014
- Source ID
- 10.1109/jmems.2013.2283795
Entities
People
- Anand Gawarikar
- Joseph Talghader
- Ryan Shea