3D Integration Using Self-Assembly at Air-Water-Solid Interface

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2014
Source ID
10.1109/jmems.2013.2291235

Entities

People

  • Cagdas Varel
  • Ji Hao Hoo
  • Karl F. Böhringer
  • Kwang Soon Park
  • Rajashree Baskaran

Organizations

  • Defense Advanced Research Projects Agency
  • University of Washington