Uncooled Infrared Detectors Using Gallium Nitride on Silicon Micromechanical Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2014
Source ID
10.1109/jmems.2013.2292368

Entities

People

  • Mina Rais-zadeh
  • Vikrant J Gokhale

Organizations

  • National Science Foundation
  • United States Army Research Laboratory

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems