Fabrication and Characterization of a Novel Nanoscale Thermal Anemometry Probe

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2014
Source ID
10.1109/jmems.2014.2299276

Entities

People

  • Alexander Smits
  • Margit Vallikivi

Organizations

  • National Science Foundation
  • Office of Naval Research