A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2014
Source ID
10.1109/jmems.2014.2301631

Entities

People

  • Martin M.-h. Lin
  • Ray Radebaugh
  • Ryan Lewis
  • Victor M. Bright
  • Yunda Wang
  • Yung-cheng Lee

Organizations

  • Defense Advanced Research Projects Agency