Measuring Effective Flexure Width by Measuring Comb Drive Capacitance

Document Details

Document Type: Pub Defense Publication
Publication Date: Aug 01, 2014
Source ID: 10.1109/jmems.2014.2301803

Entities

People

Dimitrios Peroulis
Fengyuan Li
Jason Vaughn Clark

Organizations

Defense Advanced Research Projects Agency
National Nuclear Security Administration
National Science Foundation