Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2014
Source ID
10.1109/jmems.2014.2305754

Entities

People

  • Bo Woon Soon
  • Chae Hyuck Ahn
  • Chengkuo Lee
  • Eldwin J. Ng
  • Thomas W. Kenny
  • Vu A. Hong
  • You Qian
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Science and Engineering Research Council