A Method for Attenuating the Spurious Responses of Aluminum Nitride Micromechanical Filters

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2014
Source ID
10.1109/jmems.2014.2308544

Entities

People

  • Janet Nguyen
  • Roy H. Olsson
  • Tammy Pluym
  • Vincent M. Hietala

Organizations

  • Sandia National Laboratories