Lithium Niobate on Silicon Dioxide Suspended Membranes: A Technology Platform for Engineering the Temperature Coefficient of Frequency of High Electromechanical Coupling Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2014
- Source ID
- 10.1109/jmems.2014.2312888
Entities
People
- Gianluca Piazza
- Lisha Shi
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation