Fabrication process for thick-film micromachined multi-pole electromagnets

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2014
Source ID
10.1109/jmems.2014.2315763

Entities

People

  • Evan Threlkeld
  • Jere Harrison
  • Jimmy Ming‐Tai Wu
  • Omeed Paydar
  • Pietro Musumeci
  • Rob N. Candler
  • Yongha Hwang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation