A Polysilicon Microhemispherical Resonating Gyroscope

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2014
Source ID
10.1109/jmems.2014.2327107

Entities

People

  • Curtis L. Mayberry
  • Farrokh Ayazi
  • Peng Shao
  • Vahid Tavassoli
  • Xin Gao

Organizations

  • Defense Advanced Research Projects Agency