Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2330590

Entities

People

  • Brian J. Lee
  • Chae Hyuck Ahn
  • Eldwin J. Ng
  • Ian B. Flader
  • Thomas W. Kenny
  • Vu A. Hong
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation