Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2331231

Entities

People

  • Andrew B. Graham
  • Eldwin J. Ng
  • James C. Salvia
  • Matthew W. Messana
  • Shingo Yoneoka
  • Thomas W. Kenny
  • Todd T. Branchflower
  • Vu A. Hong

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation