Microfabrication and Experimental Evaluation of a Rotational Capacitive Micromachined Ultrasonic Transducer

Document Details

Document Type: Pub Defense Publication
Publication Date: Apr 01, 2015
Source ID: 10.1109/jmems.2014.2332255

Entities

People

Donghwan Kim
Michael L. Kuntzman
Neal A. Hall

Organizations

Defense Advanced Research Projects Agency