Capacitive-Piezoelectric Transducers for High- $Q$ Micromechanical AlN Resonators

Document Details

Document Type: Pub Defense Publication
Publication Date: Apr 01, 2015
Source ID: 10.1109/jmems.2014.2332991

Entities

People

Clark T-C Nguyen
Li-wen Hung

Organizations

Defense Advanced Research Projects Agency