Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2333528

Entities

People

  • Farrokh Ayazi
  • Logan Sorenson
  • Peng Shao

Organizations

  • Defense Advanced Research Projects Agency