Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2015
- Source ID
- 10.1109/jmems.2014.2335157
Entities
People
- H-S Philip Wong
- Kimberly Harrison
- Mohammad Shavezipur
- Roger T. Howe
- Subhasish Mitra
- William Scott Lee
Organizations
- Defense Advanced Research Projects Agency
- Natural Sciences and Engineering Research Council
- Robert Bosch