Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2015
Source ID
10.1109/jmems.2014.2335157

Entities

People

  • H-S Philip Wong
  • Kimberly Harrison
  • Mohammad Shavezipur
  • Roger T. Howe
  • Subhasish Mitra
  • William Scott Lee

Organizations

  • Defense Advanced Research Projects Agency
  • Natural Sciences and Engineering Research Council
  • Robert Bosch

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems