Temperature Dependence of the Elastic Constants of Doped Silicon

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2015
Source ID
10.1109/jmems.2014.2347205

Entities

People

  • Camille L. M. Everhart
  • Chae Hyuck Ahn
  • Eldwin J. Ng
  • Thomas W. Kenny
  • Vu A. Hong
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation